7 Grants
2007
MRI: Acquisition of a Fast-Pulse-Laser for a Local Electrode Atom Probe
Nikles, David⋅Butler, William⋅Weaver, Mark⋅Klein, Tonya and Thompson, Gregory
National Science Foundation (NSF), Directorate for Mathematical & Physical Sciences, Division of Materials Research (ID: 0722631), $500,000USD, 09/01/2007 -- 08/31/2008
2004
MRI: Acquisition of an Advanced Analytical Transmission Electron Microscope
Nikles, David⋅Mankey, Gary⋅Weaver, Mark⋅Klein, Tonya and Thompson, Gregory
National Science Foundation (NSF), Directorate for Mathematical & Physical Sciences, Division of Materials Research (ID: 0421376), $900,000USD, 08/01/2004 -- 07/31/2007
2003
Acquisition of a Field Emission Scanning Electron Microscope
Bakker, Martin⋅Acoff, Viola⋅Weaver, Mark⋅Schad, Rainer and Klein, Tonya
National Science Foundation (NSF), Directorate for Mathematical & Physical Sciences, Division of Materials Research (ID: 0321180), $446,000USD, 09/01/2003 -- 08/31/2005
 
CAREER: Deposition of Metal and High K Dielectric Thin Films by Plasma Enhanced Atomic Layer Deposition for Research and Education
Klein, Tonya
National Science Foundation (NSF), Directorate for Engineering, Division of Chemical, Bioengineering, Environmental, and Transport Systems (ID: 0239213), $412,368USD, 05/15/2003 -- 04/30/2009
 
UAMEMS: An Undergraduate Program in MEMS
Leland, Robert⋅Stern, Harold⋅Weaver, Mark⋅Klein, Tonya and Kotru, Sushma
National Science Foundation (NSF), Directorate for Engineering, Division of Engineering Education and Centers (ID: 0343243), $99,959USD, 09/01/2003 -- 02/28/2005
2000
Acquisition of Surface Characterization Research Equipment for the Interdisciplinary Study of Materials Growth and Gas-Solid Reactions at Surfaces
Lane, Alan⋅Street, Shane⋅Weaver, Mark⋅Klein, Tonya and Epling, William
National Science Foundation (NSF), Directorate for Mathematical & Physical Sciences, Division of Materials Research (ID: 0079690), $196,632USD, 08/15/2000 -- 12/31/2002
 
Remote Plasma Enhanced Organometallic Chemical Vapor Deposition of High Permittivity Dielectrics
Klein, Tonya
National Science Foundation (NSF), Directorate for Engineering, Division of Electrical, Communications and Cyber Systems (ID: 0084703), $185,907USD, 10/01/2000 -- 05/31/2004