Collaborative Research: GOALI: A New Advanced Process Control Framework for Next-Generation High-Mix Semiconductor ManufacturingHe, Qinghua and Stuber, JohnNational Science Foundation (NSF), Directorate for Engineering, Division of Chemical, Bioengineering, Environmental, and Transport Systems (ID: 0853748), $98,000USD, 05/01/2009 -- 04/30/2014