Research Interests:
- Micro- and nano-electromechanical systems design, fabrication and reliability; micro- and nano-tribology; molecularly thin film synthesis and design; novel thin film processing; surface science; and semiconductor materials processing
Research Projects:
- Vapor Phase Processes for Anti-Stiction Monolayers for MEMS
- Thermal Stability of Anti-Stiction Monolayer Systems
- Alkene Based Process for an Anti-Stiction Monolayer for Polysilicon MEMS
- Hard Coatings for MEMS
To date, my research has primarily focused on the surface engineering of semiconductor materials with the ultimate goal of improving the reliability of MicroElectroMechannical Systems (MEMS).
