Expertise

Research Interests:

  • Micro- and nano-electromechanical systems design, fabrication and reliability; micro- and nano-tribology; molecularly thin film synthesis and design; novel thin film processing; surface science; and semiconductor materials processing

Research Projects:

  • Vapor Phase Processes for Anti-Stiction Monolayers for MEMS
  • Thermal Stability of Anti-Stiction Monolayer Systems
  • Alkene Based Process for an Anti-Stiction Monolayer for Polysilicon MEMS
  • Hard Coatings for MEMS

To date, my research has primarily focused on the surface engineering of semiconductor materials with the ultimate goal of improving the reliability of MicroElectroMechannical Systems (MEMS).

Communities
Chemical Engineering
Degrees
PhD, University of California, Berkeley, Chemical Engineering, 2003
BCheE, Auburn University, Chemical Engineering, 1998
Keywords
chemical engineering microelectromechanical systems (mems) elastomers or coatings