13 Grants
2008
Analysis and Control of 3-D Resist Profile in E-beam Lithography
Lee, Soo Young
Samsung, $254,040, 2008 -- 2011
2007
Development of Electron-beam Dose Control for Fabrication of Grayscale Structures and Dense Arrays of Nanoscale Features
Lee, Soo Young
Nnfc, $30,000, 2007 -- 2009
 
Fabrication of Nanoscale 3-D Structures of Arbitrary Shape by a Single-Step E-beam Grayscale Lithographic Process
Lee, Soo Young
NATIONAL SCIENCE FOUNDATION (NSF), $128,703, 2007 -- 2009
 
NER: Fabrication of 3-D Nanscale Structures of Arbitrary Shape by Single-Step E-beam Grayscale Lithographic Process
Lee, Soo Young and Prorok, Barton
National Science Foundation (NSF) (ID: 0709224), $139,703USD, 06/15/2007 -- 05/31/2009
 
REU: Fabrication of Nanoscale 3-D Structures of Arbitrary Shape by a Single-Step E-beam Grayscale Lithographic Process
Lee, Soo Young
NATIONAL SCIENCE FOUNDATION (NSF), $11,000, 2007 -- 2009
2006
Analysis of E-beam Exposure Distribution in a High-Density Ultra-Fine Feature Pattern
Lee, Soo Young
Seagate, $7,000, 2006 -- 2006
2002
Development of Versatile Proximity Effect Correction in Binary and
Lee, Soo Young
NATIONAL SCIENCE FOUNDATION (NSF), $59,653, 2002 -- 2003
 
STTR Phase I: Development of Versatile Proximity Effect Correction Schemes
Lee, Soo Young and Nabity, Joseph
National Science Foundation (NSF), Directorate for Engineering, Industrial Innovation and Partnerships (ID: 0214624), $99,663USD, 07/01/2002 -- 06/30/2003
2001
Integrated MEMS Photonics for Computer and Communication Systems:
Lee, Soo Young
NATIONAL SCIENCE FOUNDATION (NSF), $141,435, 2001 -- 2004
1997
Development of An Integrated Proximity Effect Correction Scheme
Lee, Soo Young
National Science Foundation (NSF), Directorate for Engineering, Electrical, Communications and Cyber Systems (ID: 9706944), $158,366USD, 08/01/1997 -- 07/31/2001
1996
Unsupervised Reconstruction of Left Ventricular Strain from MRI Data
Lee, Soo Young
Whitaker Foundation, $210,000, 1996 -- 1999
1990
Parallel Image Reconstruction Algorithm and Architecture for 3D-PET
Lee, Soo Young
NATIONAL INSTITUTES OF HEALTH (NIH), $137,550, Jan 1, 1990 -- Dec 31, 1992
1989
Correction of Proximity Effect in E-beam Lithography
Lee, Soo Young
Semiconductor Research Corporation, $361,618, Jan 1, 1989 -- Dec 31, 1997