102 Publications (Page 5 of 5)
2010
Pad Deflection-Based Model of Chemical{\&}{\#}x2013$\mathsemicolon$Mechanical Polishing for Use in {CAD} {IC} Layout
Comes, R.B.⋅Terrell, E.J. and Higgs, C.F.
{IEEE} Trans. Semicond. Manufact., vol. 23, pp. 121--131. | Journal Article
2009
Analysis of Feature-Scale Wear in Chemical Mechanical Polishing: Modeling and Experiments
Terrell, Elon J.⋅Comes, Ryan B. and Higgs, C. Fred
Tribol Lett, vol. 37, pp. 327--336. | Journal Article